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Multi-Hearth Electron Beam Source

multhrt2The Multi-Hearth Electron Beam Source is a heavy duty source offering large hearth capacity, high deposition rates, long filament life, and industrial reliability for R&D or production line applications. The source has four (4) crucibles which can be rotated into position either manually or automatically. The source is designed to operate at input power levels up to 12 kW. The 270° bent beam design permits complete shielding of the filament from evaporated material and falling debris and protects “line of sight” to the substrates. The source is also equipped with a water-cooled trap and permanent magnet for greater operating efficiency and safety. The electron beam can be swept in both the X and Y axis for optimum evaporation.


  • Four (4) Large Pockets — Up to 40cc
  • Interchangeable Crucibles
  • Bent Beam Design for longer filament life
  • High Operating Efficiency
  • X-Y Sweep Capability


Required Power 115 VAC or 230 VAC, 60 Hz
Output Power
Maximum Power 12 kW
Emission Voltage 10 kV
Emission Current Up to 1.2 Amps
Efficiency In excess of 99% of Beam Power into Hearth
Beam Characteristics
Type 270° Beam
Spot Size 0.375″ x 0.375″
Sweep Longitudinal/Lateral with Sweep Controller
Required Power
Source 410 kV, 01.2 A
Filament 08 VAC, 40 A
Cooling Water 2 gpm, 30 psi Pressure Differential
Required Operating Pressure Below 2 x 10-4
Maximum Bake-Out Temperature 250 C with water on
Hearth Characteristics
Material OFHC Copper
Dimensions* Truncated 30 Cone: 2.0″ x 1.50″ x 0.92″ (Top x Bottom x Depth)
Capacity Up to 40cc
Liner As Required
Overall Dimensions 5.0″ x 6.0″ x 7.5″ (HxWxL)
(127 mm X 152 mm X 191 mm
Weight 22.5 lbs.