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Multi-Hearth Electron Beam Source

multhrt2The Multi-Hearth Electron Beam Source is a heavy duty source offering large hearth capacity, high deposition rates, long filament life, and industrial reliability for R&D or production line applications. The source has four (4) crucibles which can be rotated into position either manually or automatically. The source is designed to operate at input power levels up to 12 kW. The 270° bent beam design permits complete shielding of the filament from evaporated material and falling debris and protects “line of sight” to the substrates. The source is also equipped with a water-cooled trap and permanent magnet for greater operating efficiency and safety. The electron beam can be swept in both the X and Y axis for optimum evaporation.

FEATURES

  • Four (4) Large Pockets — Up to 40cc
  • Interchangeable Crucibles
  • Bent Beam Design for longer filament life
  • High Operating Efficiency
  • X-Y Sweep Capability

SPECIFICATIONS

Required Power115 VAC or 230 VAC, 60 Hz
Output Power
Maximum Power12 kW
Emission Voltage10 kV
Emission CurrentUp to 1.2 Amps
EfficiencyIn excess of 99% of Beam Power into Hearth
Beam Characteristics
Type270° Beam
Spot Size0.375″ x 0.375″
SweepLongitudinal/Lateral with Sweep Controller
Required Power
Source410 kV, 01.2 A
Filament08 VAC, 40 A
Cooling Water2 gpm, 30 psi Pressure Differential
Required Operating PressureBelow 2 x 10-4
Maximum Bake-Out Temperature250 C with water on
Hearth Characteristics
MaterialOFHC Copper
Dimensions*Truncated 30 Cone: 2.0″ x 1.50″ x 0.92″ (Top x Bottom x Depth)
CapacityUp to 40cc
LinerAs Required
Overall Dimensions5.0″ x 6.0″ x 7.5″ (HxWxL)
(127 mm X 152 mm X 191 mm
Weight22.5 lbs.