[ Vacuum Diagnostics · Helium Mass Spectrometer Testing ]

Helium Leak Testing
& Vacuum Leak Detection

YTI provides helium mass spectrometer leak testing for vacuum coating systems, chambers, pumps, feedthroughs, valves, welded assemblies, vacuum piping and individual components. Testing can be performed on-site nationwide or at YTI to identify leaks that prevent equipment from reaching and maintaining reliable vacuum.

1984 In Business Since
40+ Years Vacuum Experience
50 States Served
24/7 On-Site Field Support
Field + Depot Testing Options

Vacuum Integrity Testing

Find the leak before replacing the system

A vacuum system that will not reach its normal base pressure does not automatically need a new pump. The problem may be a failed seal, damaged O-ring, leaking feedthrough, cracked weld, valve fault, loose flange or another path allowing atmosphere into the vacuum boundary.

Helium mass spectrometer leak testing provides a controlled method for locating these leak paths. Helium is introduced around or within the test object while a leak detector monitors for the tracer gas. A measurable helium response helps identify where gas is entering or escaping the system.

YTI combines leak detection equipment with decades of experience troubleshooting complete vacuum coating systems. That allows the technician to evaluate the helium response alongside the chamber, pumps, gauges, valves, controls, feedthroughs and connected process equipment.

Leak Testing Capabilities

Test the complete vacuum boundary or isolate individual components

YTI can evaluate complete installed vacuum systems as well as removable pumps, feedthroughs, fabricated assemblies and individual components. The correct approach depends on the equipment, accessibility, operating pressure and suspected failure.

01 · VACUUM CHAMBERS

Chamber Leak Testing

Test coating chambers, bell jars, load locks, doors, viewports, ports, chamber penetrations and other vacuum-boundary surfaces.

02 · FEEDTHROUGHS

Feedthrough & Flange Testing

Evaluate electrical, high-voltage, fluid, motion and sensor feedthroughs along with flanges, adapters, fittings and seals.

03 · FABRICATION

Welded Assembly Testing

Verify vacuum integrity after chamber modification, welding, brazing, fabrication, piping changes or component repair.

04 · VALVES & PLUMBING

Vacuum Line & Valve Testing

Diagnose leaks through valve bodies, shaft seals, fittings, tubing, flexible connections and vacuum distribution hardware.

05 · PUMPING SYSTEMS

Pump & Foreline Leak Checks

Evaluate diffusion pump assemblies, mechanical pumping systems, forelines, isolation valves, traps and connected vacuum hardware.

06 · COMPONENTS

Individual Component Testing

Controlled testing for repaired components, custom vacuum assemblies, replacement hardware and parts before installation.

Common Warning Signs

When should a vacuum system be leak tested?

Changes in pump-down time, base pressure or process repeatability can indicate a leak, especially after maintenance, equipment relocation, seal replacement or fabrication work.

01

Slow Pump-Down

The chamber takes significantly longer than normal to reach its process pressure.

02

Poor Base Pressure

The system stabilizes above the vacuum level normally achieved under the same process conditions.

03

Pressure Rise

Pressure increases unexpectedly after the chamber or a section of the system is isolated.

04

Recent Maintenance

Flanges, seals, valves, feedthroughs or pumps were disturbed and vacuum performance changed afterward.

05

New Welding or Fabrication

A chamber, pipe, fitting or custom assembly was modified and its vacuum integrity needs to be verified.

06

System Relocation

Equipment was decommissioned, moved and recommissioned and needs verification before returning to production.

07

Unstable Process

Coating results or chamber behavior change from cycle to cycle without an obvious process cause.

08

Suspected Component Leak

A feedthrough, valve, seal, viewport or individual component is suspected but the leak location has not been confirmed.

Complete Vacuum Diagnosis

Poor vacuum does not automatically mean an atmospheric leak

A system can behave as though it has a leak even when the vacuum boundary is intact. YTI evaluates the overall condition of the system before assuming that helium testing alone will identify the problem.

TRUE LEAK

Atmospheric Leak

Failed O-rings, loose flanges, cracked welds, leaking feedthroughs, valve faults and damaged chamber hardware.

TRAPPED GAS

Virtual Leak

Blind holes, threads, enclosed cavities and trapped volumes can slowly release gas and imitate an external leak.

SURFACE LOAD

Outgassing & Contamination

Water vapor, oil, process residue and contaminated chamber surfaces can keep pressure elevated without a physical opening.

EQUIPMENT

Pumping Problem

Weak pumps, valve restrictions, diffusion pump problems, cryogenic faults or foreline issues can reduce vacuum performance.

INSTRUMENTATION

Gauge or Sensor Problem

Contaminated gauges, failed sensors, incorrect ranges or control faults can report vacuum conditions incorrectly.

PROCESS

Process Conditions

Chamber loading, process gases, water cooling and cycle changes can affect observed vacuum without a chamber leak.

Helium Leak Detection Methods

The test method depends on the system and suspected leak path

Helium leak detection is not a single universal procedure. YTI selects the appropriate method based on whether the component can be evacuated, pressurized, isolated or tested as part of an assembled production system.

01 Vacuum Method

Outside-In Testing

The test object is evacuated while helium is applied around seals, joints, welds, feedthroughs and suspected leak locations. The detector identifies helium entering the vacuum boundary.

02 Pressure Method

Inside-Out Testing

Helium is placed inside a component or assembly and the exterior is checked for tracer gas escaping through a leak path.

03 Localized Detection

Sniffer Testing

A helium-sensitive probe is moved around the test object to identify tracer gas escaping from a pressurized component or assembly.

04 Enclosed Detection

Accumulation Testing

Escaping helium is allowed to collect in a controlled enclosure before being sampled when direct probing is difficult.

Field & Facility Support

On-site leak testing or controlled testing at YTI

Large coating systems and production equipment are often best diagnosed in their installed configuration. Individual vacuum components and repaired assemblies may be better suited to controlled testing at YTI.

ON-SITE

Field Leak Testing

Appropriate for complete coating systems, production chambers, pumping systems, equipment after maintenance, plant moves and faults that only appear when the full system is assembled.

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IN-HOUSE

Component Leak Testing

Appropriate for removable pumps, feedthroughs, valves, fabricated assemblies, repaired parts and vacuum components that can be isolated from the production system.

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SYSTEM LEVEL

Complete Vacuum Diagnosis

Appropriate when it is unclear whether the problem comes from a leak, pump, gauge, valve, contamination issue, control fault or another part of the vacuum process.

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The YTI Process

Diagnose, isolate, locate and verify

A useful leak test should produce an actionable result. YTI reviews the system history and operating symptoms before testing so the investigation is focused on the most likely failure paths.

01

Review the Symptoms

Review base pressure, pump-down time, recent service, process changes, system history and known problem areas.

02

Prepare & Isolate

Configure the chamber or component and isolate sections where practical to narrow the potential leak area.

03

Apply Helium & Test

Apply or sample helium using the appropriate method while monitoring the leak detector response.

04

Locate the Leak

Test seals, joints, welds, valves, feedthroughs and other suspected areas to isolate the actual leak path.

05

Repair the Cause

YTI can support seal replacement, component repair, welding, fabrication, pump service or related corrective work.

06

Retest & Verify

Repeat testing after repair and verify that the vacuum system can return to acceptable operating performance.

Vacuum Applications

Leak testing for production and research vacuum systems

PVD Coating Systems Electron-Beam Evaporation Thermal Evaporation Sputtering Systems Optical Coating Semiconductor Equipment Research Vacuum Systems Vacuum Chambers Diffusion Pumps Mechanical Pumping Cryogenic Systems Feedthroughs Vacuum Valves Custom Fabrication Vacuum Piping System Recommissioning

Why Choose YTI

Leak detection connected to the complete vacuum process

01

Vacuum Experience

YTI has supported vacuum coating and high-vacuum equipment since 1984.

02

System-Level Diagnosis

Leak testing can be evaluated alongside pumps, gauges, controls, valves, cryogenic equipment and process conditions.

03

Repair Capability

YTI can support machining, welding, fabrication, pump repair, electronics, controls and component refurbishment after the fault is found.

04

Field & Depot Support

Installed production systems can be diagnosed on-site while removable equipment can be serviced and tested at YTI.

Frequently Asked Questions

Helium leak testing FAQs

What is helium leak testing?

Helium leak testing uses helium as a tracer gas and a mass spectrometer leak detector to locate gas passing through a vacuum boundary. Depending on the equipment, helium can be applied around an evacuated system or introduced into a pressurized test component.

Why is helium used to find vacuum leaks?

Helium can pass through very small leak paths and can be selectively measured by a helium mass spectrometer. That makes it useful for finding leaks that may not be visible or obvious from pressure readings alone.

What equipment can YTI helium leak test?

YTI can support vacuum coating systems, chambers, pumps, feedthroughs, valves, flanges, welded assemblies, vacuum plumbing, fabricated parts and other high-vacuum components depending on the equipment and required test configuration.

Can YTI perform helium leak testing on-site?

Yes. On-site helium leak detection can be performed as part of vacuum troubleshooting, preventive maintenance, system relocation, recommissioning and other field-service work.

Can individual vacuum components be tested?

Yes. Pumps, valves, feedthroughs, welded assemblies and other removable vacuum components may be tested individually when the component and required setup allow it.

Does poor base pressure always mean there is a leak?

No. Poor base pressure can also be caused by contamination, outgassing, trapped volumes, worn pumps, valve restrictions, gauge errors, cryogenic problems or other equipment faults. YTI can evaluate the complete vacuum system before determining the correct repair path.

Should a chamber be leak tested after welding?

Leak verification can be appropriate after chamber welding, flange modification, feedthrough replacement, fabrication or other work that changes the vacuum boundary.

Should a coating system be leak tested after relocation?

Yes, leak checking can be an important part of recommissioning. Moving a system can disturb flanges, O-rings, feedthroughs, valves, vacuum plumbing and other connections that should be verified before process validation.

Need to locate a vacuum leak?

Send YTI the system manufacturer, model, current base pressure, normal operating pressure, recent maintenance history and what changed. Our team can help determine the correct diagnostic path.