[ Deposition Equipment Hub ]
Electron-Beam Guns
& Evaporation Sources
Understand the source equipment that converts high-voltage electron energy into controlled material evaporation. Explore gun and hearth configurations, beam sweep, emission control, cooling, feedthroughs, manufacturers, system integration and the right YTI path for service, parts, upgrades or replacement equipment.
The Complete Source Package
More than a gun inside the chamber
An electron-beam evaporation source is a connected deposition package. The source body, hearth, filament or cathode hardware, beam-bending and sweep magnets, high-voltage supply, emission control, sweep controller, shutter, cooling water, feedthroughs, rate monitoring and chamber interlocks must all work together.
This page helps equipment owners understand those connected layers and identify the correct next step. It does not duplicate YTI’s dedicated pages for component-level electronics repair, full electronics refurbishment, chamber troubleshooting, controls modernization, stocked source equipment or custom vacuum fabrication.
Source Configurations
Electron-beam guns and source equipment YTI supports
270° Bent-Beam Sources
Common high-vacuum evaporation architecture that bends and directs the electron beam toward material in a water-cooled hearth while helping isolate the filament region from the evaporant.
- Source body and gun hardware
- Beam-bending and focusing components
- Emission, sweep and high-voltage interfaces
Single-Hearth Sources
Focused source configurations built around one primary material position for dedicated films, repeat processes, research tools and systems where simple material handling is preferred.
- Single material position
- Hearth, liner and crucible options
- Shutter and monitoring integration
Multi-Hearth & Indexed Sources
Sources with multiple pockets or selectable positions for sequential materials, multilayer coatings, process flexibility and reduced chamber opening between material changes.
- Multiple material pockets
- Indexing and position hardware
- Recipe and interlock considerations
Ultra Source-Style & High-Capacity Configurations
Larger or specialized source packages used where capacity, material volume, power, beam control or production requirements exceed a basic single-hearth setup.
- Higher-capacity source layouts
- Application-specific hearth geometry
- Power, cooling and chamber-fit review
Beam Sweep, Emission & Source Controls
Sweep magnets, sweep controllers, emission controls, high-voltage supplies, rate feedback and source commands that shape beam motion and stabilize evaporation output.
- Sweep pattern and uniformity
- Emission and high-voltage control
- Rate feedback and shutter commands
Hearth, Shutter, Cooling & Interface Hardware
The mechanical and utility hardware that keeps the source mounted, cooled, isolated, serviceable and connected to the chamber, power, water and control systems.
- Hearths, liners, crucibles and shutters
- Fluid and electrical feedthroughs
- Cooling circuits, mounts and shields
System Architecture
Six layers between the coating recipe and stable evaporation
Material & Process Requirement
Coating material, target rate, film thickness, purity, substrate geometry, process pressure, run duration, recipe sequence and production goal.
Hearth & Material Interface
Hearth pocket, crucible or liner, material loading, thermal behavior, capacity, indexing, shielding and the physical location where the evaporant is heated.
Electron Generation
Filament or cathode hardware, emission region, insulation, electrical connections and the components that create and regulate the electron stream.
Beam Bend, Focus & Sweep
Magnets, pole pieces, geometry, sweep coils, sweep pattern and controls that direct the beam onto the material and distribute energy across the melt pool.
Power, Feedback & Interlocks
High-voltage supply, emission controller, sweep controller, rate feedback, arc handling, shutter logic, pressure permissives, cooling checks and safety interlocks.
Chamber Integration & Utilities
Source mounting, electrical and fluid feedthroughs, cooling-water flow, vacuum level, shielding, deposition monitoring, controls, service access and operator sequence.
Application Fit
What determines the right source configuration
Hearth Configuration
Single-hearth, multi-hearth, indexed and higher-capacity source layouts should match the number of materials, recipe sequence, run length and chamber access requirements.
Explore coating-system architecture →Material & Liner Compatibility
Material chemistry, melt behavior, crucible or liner selection, charge size, power demand, contamination risk and cleaning requirements affect source setup.
View process troubleshooting →Beam Geometry & Sweep
Bending, focusing, beam position, sweep pattern, magnet condition and melt-pool coverage affect stability, uniform heating and usable material capacity.
View sweep and electronics repair →Cooling Water & Feedthroughs
Flow, temperature, water quality, pressure, hose routing, seals, fluid feedthroughs and cooling interlocks protect the hearth, source and chamber.
View feedthrough fabrication →Vacuum & Contamination
Base pressure, outgassing, source cleanliness, shields, material spitting, arc paths, pump performance and chamber condition can affect source reliability.
View field troubleshooting →Controls, Monitoring & Interlocks
Power supply, emission control, sweep controller, rate monitor, shutter, gauge signals, cooling permissives and PLC logic must operate as one sequence.
View controls and sensor upgrades →Dedicated Service Paths
Continue to the page for the work your source system needs
Electronics & Power Supply Repair
Component-level diagnosis, repair, load testing and recalibration for high-voltage supplies, emission controls, sweep controllers and source electronics.
View electronics repair → Aging or repeatedly failing electronicsElectronics & Power Supply Refurbishment
Deeper restoration for obsolete, unstable or production-critical source electronics that need more than a single-fault repair.
View electronics refurbishment → Cause not yet isolatedCoating Troubleshooting & Field Service
System-level diagnosis when arcing, weak emission, unstable rate, poor vacuum, contamination, cooling or chamber conditions may be contributing.
View field troubleshooting → Obsolete or limiting source controlsChamber Controls & Sensor Upgrade
Modernization of source controls, interlocks, rate feedback, gauges, PLCs, HMIs, panels, wiring and operator interfaces.
View controls upgrade → Source electronics and assembliesElectronic System Stocking
Stocked and refurbished e-beam sources, power supplies, sweep controllers, source hardware and related replacement electronics.
View electronic stocking → Critical source sparesComponent Stocking
Stocking support for hearth hardware, shutters, sweep components, feedthroughs, sensor parts, power supplies, controllers and other production-critical items.
View component stocking → Cooling or chamber interfaceFeedthrough & Flange Fabrication
Custom electrical and fluid feedthroughs, source interfaces, flanges, adapters, chamber ports and vacuum hardware for source installation or repair.
View feedthrough fabrication → Custom source hardwareMachining & Vacuum Fabrication
Custom source mounts, brackets, shields, plates, cooling hardware, adapters and replacement parts built around the chamber and application.
View custom fabrication →Arcing, unstable emission or a source that will not hold rate?
YTI can evaluate the source, power supply, sweep controls, cooling, feedthroughs, chamber vacuum, rate feedback and interlocks as one connected deposition system.
Independent Multi-Brand Support
Electron-beam gun and source manufacturers
YTI evaluates current, discontinued and integrated source equipment by exact model, hearth configuration, chamber application, controls and condition. Manufacturer pages below are part of the planned brand-support library.
Telemark
Electron-beam guns, single- and multi-hearth sources, Ultra Source-style configurations, source hardware, sweep systems, high-voltage supplies and connected controls.
View Telemark support Future page →Sloan
Legacy and current source equipment, deposition hardware, sweep and emission systems, feedthroughs, instrumentation and source-related coating equipment.
View Sloan support Future page →YTI
YTI-built, refurbished, adapted and replacement source equipment, custom source hardware, integrated controls, fabricated interfaces and legacy-equipment solutions.
View YTI products Future page →Other Manufacturers
Send the make, model, serial plate, source photos, hearth layout, power-supply information and chamber details for other current, discontinued or hard-to-identify sources.
Browse all manufacturers →Equipment Lifecycle
One source can move through several YTI support paths
Specify & Integrate
Match material, hearth capacity, source geometry, beam controls, power, cooling, chamber footprint, feedthroughs, vacuum level, monitoring and interlocks.
Operate & Maintain
Monitor source cleanliness, hearth and liner condition, cooling flow, filament or cathode health, arc history, beam sweep, emission, shutters and connectors.
Repair or Refurbish
Choose targeted repair for a known electronic or hardware fault, or deeper refurbishment when age, contamination, repeat failures or obsolete components affect reliability.
Upgrade, Adapt or Replace
Modernize source controls, integrate replacement electronics, fabricate interfaces, adapt chamber hardware or evaluate stocked and refurbished source equipment.
Start with the Right Path
Resources for source performance and production recovery
Power & Controller Repair
For arcing supplies, weak emission, failed sweep, unstable output, dead channels, electronic faults and known source-control problems.
View electronics repair →Source & Electronic Stocking
For stocked or refurbished sources, sweep controllers, e-beam power supplies, source hardware and critical replacement electronics.
View electronic system stocking →System Troubleshooting
For source problems that may involve vacuum, contamination, cooling, controls, chamber geometry, materials, monitoring or operator sequence.
View field troubleshooting →Feedthroughs & Interfaces
For obsolete or damaged electrical and fluid feedthroughs, source mounting interfaces, flanges, adapters and chamber connections.
View feedthrough fabrication →Used & Refurbished Equipment
For source packages, power supplies, controls and related equipment that may support replacement, repurposing or production recovery.
View used equipment support →Components & Source Hardware
Browse YTI component categories or ask about hearth hardware, feedthroughs, magnets, shutters, controls, electronics and replacement parts.
Explore components →Applications
Electron-beam evaporation across precision thin-film processes
YTI supports electron-beam sources wherever high-purity materials, controlled evaporation, repeatable film properties and maintainable vacuum-coating equipment matter.
Why YTI
Source support backed by complete vacuum-system capability
Complete Source Package
Gun, hearth, beam controls, power, sweep, cooling, feedthroughs, vacuum conditions, monitoring and chamber integration evaluated together.
In-House Electronics Lab
Component-level diagnosis, repair, refurbishment, load testing, calibration support and legacy electronics work under one roof.
Fabrication & Integration
Custom source mounts, adapters, feedthroughs, flanges, cooling hardware, panels, controls and chamber modifications can support the complete project.
Current & Legacy Equipment
Independent support for modern, discontinued, modified and mixed-brand source equipment, electronics and vacuum-coating systems.
Have an electron-beam gun or source package that needs attention?
Send the manufacturer, model, serial number, hearth configuration, chamber application, materials, power-supply and sweep-controller models, source photos, feedthroughs, cooling layout, alarms, symptoms, manuals and production urgency.
Answers
