Multi-Hearth Electron Beam Source
The Multi-Hearth Electron Beam Source is a heavy duty source offering large hearth capacity, high deposition rates, long filament life, and industrial reliability for R&D or production line applications. The source has four (4) crucibles which can be rotated into position either manually or automatically. The source is designed to operate at input power levels up to 12 kW. The 270° bent beam design permits complete shielding of the filament from evaporated material and falling debris and protects “line of sight” to the substrates. The source is also equipped with a water-cooled trap and permanent magnet for greater operating efficiency and safety. The electron beam can be swept in both the X and Y axis for optimum evaporation.
FEATURES
- Four (4) Large Pockets — Up to 40cc
- Interchangeable Crucibles
- Bent Beam Design for longer filament life
- High Operating Efficiency
- X-Y Sweep Capability
SPECIFICATIONS
| Required Power | 115 VAC or 230 VAC, 60 Hz |
| Output Power | |
| Maximum Power | 12 kW |
| Emission Voltage | 10 kV |
| Emission Current | Up to 1.2 Amps |
| Efficiency | In excess of 99% of Beam Power into Hearth |
| Beam Characteristics | |
| Type | 270° Beam |
| Spot Size | 0.375″ x 0.375″ |
| Sweep | Longitudinal/Lateral with Sweep Controller |
| Required Power | |
| Source | 410 kV, 01.2 A |
| Filament | 08 VAC, 40 A |
| Cooling Water | 2 gpm, 30 psi Pressure Differential |
| Required Operating Pressure | Below 2 x 10-4 |
| Maximum Bake-Out Temperature | 250 C with water on |
| Hearth Characteristics | |
| Material | OFHC Copper |
| Dimensions* | Truncated 30 Cone: 2.0″ x 1.50″ x 0.92″ (Top x Bottom x Depth) |
| Capacity | Up to 40cc |
| Liner | As Required |
| Overall Dimensions | 5.0″ x 6.0″ x 7.5″ (HxWxL) (127 mm X 152 mm X 191 mm |
| Weight | 22.5 lbs. |
