Single Hearth Electron Beam Source
The Single Hearth Electron Beam Source is a heavy duty source offering large hearth capacity, high deposition rates, long filament life, and industrial reliability for R&D or production line applications. The source has one (1) crucible which can accept a variety of liners. The source is designed to operate at input power levels up to 12 kW. The 270 ° bent beam design permits complete shielding of the filament from evaporated materials and falling debris. The source is also equipped with a water-cooled trap and permanent magnet for greater operating efficiency and safety. The electron beam can be swept in both the X and Y axis for optimum evaporation.
FEATURES
- Large Pocket — Up to 40cc
- Interchangeable Crucibles
- 270 Bent Beam Design for Longer Filament Life
- High Operating Efficiency
- XY Sweep Capability
SPECIFICATIONS
| Output Power | |
| Maximum Power | 12 kW |
| Emission Voltage | 10 kV |
| Emission Current | Up to 1.2 Amps |
| Efficiency | In excess of 99% of Beam Power into Hearth |
| Beam Characteristics | |
| Type | 270° Beam |
| Spot Size | 0.375″ x 0.375″ |
| Sweep | Longitudinal/Lateral with Sweep Controller |
| Required Power | |
| Source | 410 kV, 01.2 A |
| Filament | 08 VAC, 40 A |
| Cooling Water | 1.7 gpm, 45 psi Minimum |
| Required Operating Pressure | Below 2 x 10-4 |
| Maximum Bake-Out Temperature | 250 C |
| Hearth Characteristics | |
| Material | OFHC Copper |
| Dimensions* | Truncated 30 Cone: 2.0″ x 1.50″ x 0.92″ (Top x Bottom x Depth) |
| Capacity | 7cc to 40cc |
| Liner | As Required |
| Overall Dimensions | 5.4″ x 4.5″ x 5.9″ (HxWxL) (137 mm X 114 mm X 149 mm |
| Weight | 10 lbs. |
